Fabrication of silicon nanopillar teradot arrays by electron-beam patterning for nanoimprint molds. [electronic resource]

By: Contributor(s): Producer: 20090206Description: 2118-22 p. digitalISSN:
  • 1613-6829
Subject(s): Online resources: In: Small (Weinheim an der Bergstrasse, Germany) vol. 4
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Publication Type: Journal Article; Research Support, Non-U.S. Gov't

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