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	1.	Reflection mask defect repair. [electronic resource] by Hawryluk, A M Stewart, D Producer: 20130704 In: Applied optics vol. 32 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	2.	Wavelength considerations in soft-x-ray projection lithography. [electronic resource] by Hawryluk, A M Ceglio, N M Producer: 20130704 In: Applied optics vol. 32 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	3.	Wafer cost analysis for a soft x-ray projection lithography system. [electronic resource] by Ceglio, N M Hawryluk, A M Producer: 20121002 In: Journal of X-ray science and technology vol. 3 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	4.	Power loading limitations in soft x-ray projection lithography. [electronic resource] by Hawryluk, A M Ceglio, N M Producer: 20121002 In: Journal of X-ray science and technology vol. 4 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	5.	Front-end design issues in soft-x-ray projection lithography. [electronic resource] by Ceglio, N M Hawryluk, A M Sommargren, G E Producer: 20130704 In: Applied optics vol. 32 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	6.	Imaging x-ray spectrometer for laser fusion applications. [electronic resource] by Ceglio, N M Hawryluk, A M Price, R H Producer: 20100520 In: Applied optics vol. 21 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	7.	Time-resolved x-ray transmission grating spectrometer for studying laser-produced plasmas. [electronic resource] by Ceglio, N M Kauffman, R L Hawryluk, A M Medecki, H Producer: 20081110 In: Applied optics vol. 22 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	8.	Deep-ultraviolet spatial-period division using an excimer laser. [electronic resource] by Hawryluk, A M Smith, H I Osgood, R M Ehrlich, D J Producer: 20121002 In: Optics letters vol. 7 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	9.	Demonstration of guided-wave phenomena at extreme-ultraviolet and soft-x-ray wavelengths. [electronic resource] by Ceglio, N M Hawryluk, A M Stearns, D G Kühne, M Müller, P Producer: 20091211 In: Optics letters vol. 13 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	10.	Multipass amplification of soft x-rays in a laser cavity. [electronic resource] by Ceglio, N M Stearns, D G Gaines, D F Hawryluk, A M Trebes, J E Producer: 20121002 In: Optics letters vol. 13 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)