Your search returned 5 results.

Results
	1.	A Three-Step Atomic Layer Deposition Process for SiN [electronic resource] by Ovanesyan, Rafaiel A Hausmann, Dennis M Agarwal, Sumit Producer: 20180730 In: ACS applied materials & interfaces vol. 10 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	2.	Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si₂Cl₆ and NH₃ Plasma. [electronic resource] by Ovanesyan, Rafaiel A Hausmann, Dennis M Agarwal, Sumit Producer: 20150820 In: ACS applied materials & interfaces vol. 7 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	3.	Gas Phase Organic Functionalization of SiO [electronic resource] by Gasvoda, Ryan J Wang, Scott Hausmann, Dennis M Hudson, Eric A Agarwal, Sumit Publication details: Langmuir : the ACS journal of surfaces and colloids 12 2018 In: Langmuir : the ACS journal of surfaces and colloids vol. 34 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	4.	Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N [electronic resource] by Faraz, Tahsin van Drunen, Maarten Knoops, Harm C M Mallikarjunan, Anupama Buchanan, Iain Hausmann, Dennis M Henri, Jon Kessels, Wilhelmus M M Producer: 20180730 In: ACS applied materials & interfaces vol. 9 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	5.	Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies. [electronic resource] by Faraz, Tahsin Knoops, Harm C M Verheijen, Marcel A van Helvoirt, Cristian A A Karwal, Saurabh Sharma, Akhil Beladiya, Vivek Szeghalmi, Adriana Hausmann, Dennis M Henri, Jon Creatore, Mariadriana Kessels, Wilhelmus M M Producer: 20180730 In: ACS applied materials & interfaces vol. 10 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)