[Model-based FTIR reflectometry measurement system for deep trench structures of DRAM]. [electronic resource]

By: Contributor(s): Producer: 20100525Description: 935-9 p. digitalISSN:
  • 1000-0593
 In: Guang pu xue yu guang pu fen xi = Guang pu vol. 29
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Publication Type: English Abstract; Journal Article

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