APA

Wu Y., Giddings A. D., Verheijen M. A., Macco B., Prosa T. J., Larson D. J., Roozeboom F. & Kessels W. M. M. (2018). Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography. : Chemistry of materials : a publication of the American Chemical Society.

Chicago

Wu Yizhi, Giddings A Devin, Verheijen Marcel A, Macco Bart, Prosa Ty J, Larson David J, Roozeboom Fred and Kessels Wilhelmus M M. 2018. Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography. : Chemistry of materials : a publication of the American Chemical Society.

Harvard

Wu Y., Giddings A. D., Verheijen M. A., Macco B., Prosa T. J., Larson D. J., Roozeboom F. and Kessels W. M. M. (2018). Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography. : Chemistry of materials : a publication of the American Chemical Society.

MLA

Wu Yizhi, Giddings A Devin, Verheijen Marcel A, Macco Bart, Prosa Ty J, Larson David J, Roozeboom Fred and Kessels Wilhelmus M M. Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography. : Chemistry of materials : a publication of the American Chemical Society. 2018.