Real-time DC-dynamic biasing method for switching time improvement in severely underdamped fringing-field electrostatic MEMS actuators. [electronic resource]

By: Contributor(s): Producer: 20150223Description: e51251 p. digitalISSN:
  • 1940-087X
Subject(s): Online resources: In: Journal of visualized experiments : JoVE no. 90
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Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S.; Video-Audio Media

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