APA
Mai L., Mitschker F., Bock C., Niesen A., Ciftyurek E., Rogalla D., Mickler J., Erig M., Li Z., Awakowicz P., Schierbaum K. & Devi A. (2020). From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications. : Small (Weinheim an der Bergstrasse, Germany).
Chicago
Mai Lukas, Mitschker Felix, Bock Claudia, Niesen Alessia, Ciftyurek Engin, Rogalla Detlef, Mickler Johannes, Erig Matthias, Li Zheshen, Awakowicz Peter, Schierbaum Klaus and Devi Anjana. 2020. From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications. : Small (Weinheim an der Bergstrasse, Germany).
Harvard
Mai L., Mitschker F., Bock C., Niesen A., Ciftyurek E., Rogalla D., Mickler J., Erig M., Li Z., Awakowicz P., Schierbaum K. and Devi A. (2020). From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications. : Small (Weinheim an der Bergstrasse, Germany).
MLA
Mai Lukas, Mitschker Felix, Bock Claudia, Niesen Alessia, Ciftyurek Engin, Rogalla Detlef, Mickler Johannes, Erig Matthias, Li Zheshen, Awakowicz Peter, Schierbaum Klaus and Devi Anjana. From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications. : Small (Weinheim an der Bergstrasse, Germany). 2020.