Development of parametric material, energy, and emission inventories for wafer fabrication in the semiconductor industry. [electronic resource]

By: Contributor(s): Producer: 20040323Description: 5373-82 p. digitalISSN:
  • 0013-936X
Subject(s): Online resources: In: Environmental science & technology vol. 37
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Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S.; Review

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