Investigation of the Young's Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC Substrates. [electronic resource]

By: Contributor(s): Publication details: Micromachines Nov 2019ISSN:
  • 2072-666X
Online resources: In: Micromachines vol. 10
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Publication Type: Journal Article

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