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From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications. [electronic resource] by
- Mai, Lukas
- Mitschker, Felix
- Bock, Claudia
- Niesen, Alessia
- Ciftyurek, Engin
- Rogalla, Detlef
- Mickler, Johannes
- Erig, Matthias
- Li, Zheshen
- Awakowicz, Peter
- Schierbaum, Klaus
- Devi, Anjana
Publication details: Small (Weinheim an der Bergstrasse, Germany) Jun 2020
In:
Small (Weinheim an der Bergstrasse, Germany) vol. 16
Availability: No items available.
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Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Tin(IV) Oxide from a Functionalized Alkyl Precursor: Fabrication and Evaluation of SnO [electronic resource] by
- Mai, Lukas
- Zanders, David
- Subaşı, Ersoy
- Ciftyurek, Engin
- Hoppe, Christian
- Rogalla, Detlef
- Gilbert, Wolfram
- Arcos, Teresa de Los
- Schierbaum, Klaus
- Grundmeier, Guido
- Bock, Claudia
- Devi, Anjana
Publication details: ACS applied materials & interfaces Jan 2019
In:
ACS applied materials & interfaces vol. 11
Availability: No items available.
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