A micro opto-mechanical displacement sensor based on micro-diffraction gratings: design and characterization. [electronic resource]

By: Contributor(s): Producer: 20150820Description: 4714-7 p. digitalISSN:
  • 2694-0604
Subject(s): Online resources: In: Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society. Annual International Conference vol. 2013
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Publication Type: Journal Article; Research Support, Non-U.S. Gov't

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