Flux stabilization of silicon nitride microsieves by backpulsing and surface modification with PEG moieties. [electronic resource]
Producer: 20070917Description: 831-40 p. digitalISSN:- 0021-9797
- Air Pollutants, Occupational
- Glass
- Microchemistry
- Microscopy, Electron, Scanning
- Polyethylene Glycols -- chemical synthesis
- Polymethacrylic Acids -- chemical synthesis
- Silicon
- Silicon Compounds -- chemistry
- Surface Properties
- Trimethylsilyl Compounds -- chemical synthesis
- Water Pollutants -- chemistry
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Publication Type: Journal Article; Research Support, Non-U.S. Gov't
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