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	1.	Data-driven approaches to optical patterned defect detection. [electronic resource] by Henn, Mark-Alexander Zhou, Hui Barnes, Bryan M Publication details: OSA continuum Sep 2019 In: OSA continuum vol. 2 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	2.	Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy. [electronic resource] by Sohn, Martin Y Barnes, Bryan M Silver, Richard M Publication details: Optik 03 2018 In: Optik vol. 156 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	3.	Improving optical measurement uncertainty with combined multitool metrology using a Bayesian approach. [electronic resource] by Zhang, Nien Fan Silver, Richard M Zhou, Hui Barnes, Bryan M Producer: 20121217 In: Applied optics vol. 51 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	4.	Fourier domain optical tool normalization for quantitative parametric image reconstruction. [electronic resource] by Qin, Jing Silver, Richard M Barnes, Bryan M Zhou, Hui Goasmat, Francois Producer: 20140428 In: Applied optics vol. 52 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	5.	Optimizing the nanoscale quantitative optical imaging of subfield scattering targets. [electronic resource] by Henn, Mark-Alexander Barnes, Bryan M Zhou, Hui Sohn, Martin Silver, Richard M Producer: 20180129 In: Optics letters vol. 41 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	6.	Deep-subwavelength Nanometric Image Reconstruction using Fourier Domain Optical Normalization. [electronic resource] by Qin, Jing Silver, Richard M Barnes, Bryan M Zhou, Hui Dixson, Ronald G Henn, Mark-Alexander Publication details: Light, science & applications In: Light, science & applications vol. 5 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	7.	Scatterfield microscopy for extending the limits of image-based optical metrology. [electronic resource] by Silver, Richard M Barnes, Bryan M Attota, Ravikiran Jun, Jay Stocker, Michael Marx, Egon Patrick, Heather J Producer: 20070830 In: Applied optics vol. 46 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	8.	Three-dimensional deep sub-wavelength defect detection using λ = 193 nm optical microscopy. [electronic resource] by Barnes, Bryan M Sohn, Martin Y Goasmat, Francois Zhou, Hui Vladár, András E Silver, Richard M Arceo, Abraham Producer: 20140710 In: Optics express vol. 21 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)
	9.	Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression. [electronic resource] by Henn, Mark-Alexander Silver, Richard M Villarrubia, John S Zhang, Nien Fan Zhou, Hui Barnes, Bryan M Ming, Bin Vladár, András E Publication details: Journal of micro/nanolithography, MEMS, and MOEMS : JM3 In: Journal of micro/nanolithography, MEMS, and MOEMS : JM3 vol. 14 Online resources: Available from publisher's website Availability: No items available. Save to lists Add to cart (remove)