Qualification of a sublimation tool applied to the case of metalorganic chemical vapor deposition of In₂O₃ from In(tmhd)₃ as a solid precursor. [electronic resource]

By: Contributor(s): Producer: 20160706Description: 023901 p. digitalISSN:
  • 1089-7623
Online resources: In: The Review of scientific instruments vol. 87
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Publication Type: Journal Article

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