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994902.
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Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition. [electronic resource] by
- Kim, Hyo Jin K
- Kaplan, Kirsten E
- Schindler, Peter
- Xu, Shicheng
- Winterkorn, Martin M
- Heinz, David B
- English, Timothy S
- Provine, J
- Prinz, Fritz B
- Kenny, Thomas W
Producer: 20190308
In:
ACS applied materials & interfaces vol. 11
Availability: No items available.
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