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Circuit fabrication at 17 nm half-pitch by nanoimprint lithography. [electronic resource] by
- Jung, Gun-Young
- Johnston-Halperin, Ezekiel
- Wu, Wei
- Yu, Zhaoning
- Wang, Shih-Yuan
- Tong, William M
- Li, Zhiyong
- Green, Jonathan E
- Sheriff, Bonnie A
- Boukai, Akram
- Bunimovich, Yuri
- Heath, James R
- Williams, R Stanley
Producer: 20060420
In:
Nano letters vol. 6
Availability: No items available.
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