Results
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24268.
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Soft-x-ray projection lithography experiments using Schwarzschild imaging optics. [electronic resource] by
- Tichenor, D A
- Kubiak, G D
- Malinowski, M E
- Stulen, R H
- Haney, S J
- Berger, K W
- Brown, L A
- Sweatt, W C
- Bjorkholm, J E
- Freeman, R R
- Himel, M D
- Macdowell, A A
- Tennant, D M
- Wood, R
- Bokor, J
- Jewell, T E
- Mansfield, W M
- Waskiewicz, W K
- White, D L
- Windt, D L
Producer: 20140228
In:
Applied optics vol. 32
Availability: No items available.
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