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Understanding the Mechanism of Electronic Defect Suppression Enabled by Nonidealities in Atomic Layer Deposition. [electronic resource] by
- Kavrik, Mahmut Sami
- Bostwick, Aaron
- Rotenberg, Eli
- Tang, Kechao
- Thomson, Emily
- Aoki, Toshihiro
- Fruhberger, Bernd
- Taur, Yuan
- McIntyre, Paul C
- Kummel, Andrew C
Publication details: Journal of the American Chemical Society Jan 2020
In:
Journal of the American Chemical Society vol. 142
Availability: No items available.
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Engineering High- k/SiGe Interface with ALD Oxide for Selective GeO [electronic resource] by
- Kavrik, Mahmut S
- Ercius, Peter
- Cheung, Joanna
- Tang, Kechao
- Wang, Qingxiao
- Fruhberger, Bernd
- Kim, Moon
- Taur, Yuan
- McIntyre, Paul C
- Kummel, Andrew C
Publication details: ACS applied materials & interfaces Apr 2019
In:
ACS applied materials & interfaces vol. 11
Availability: No items available.
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