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Double-side-coated nanomechanical membrane-type surface stress sensor (MSS) for one-chip-one-channel setup. [electronic resource] by
- Yoshikawa, Genki
- Loizeau, Frederic
- Lee, Cory J Y
- Akiyama, Terunobu
- Shiba, Kota
- Gautsch, Sebastian
- Nakayama, Tomonobu
- Vettiger, Peter
- de Rooij, Nico F
- Aono, Masakazu
Producer: 20140106
In:
Langmuir : the ACS journal of surfaces and colloids vol. 29
Availability: No items available.
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