Results
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15481.
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15482.
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15485.
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15488.
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15490.
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15497.
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15498.
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15499.
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Hartmann wave-front measurement at 13.4 nm with lambdaEUV/120 accuracy. [electronic resource] by
- Mercère, Pascal
- Zeitoun, Philippe
- Idir, Mourad
- Le Pape, Sébastien
- Douillet, Denis
- Levecq, Xavier
- Dovillaire, Guillaume
- Bucourt, Samuel
- Goldberg, Kenneth A
- Naulleau, Patrick P
- Rekawa, Senajith
Producer: 20031029
In:
Optics letters vol. 28
Availability: No items available.
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15500.
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