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Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection. [electronic resource] by
- Malsagova, Kristina A
- Pleshakova, Tatyana O
- Kozlov, Andrey F
- Shumov, Ivan D
- Ilnitskii, Mikhail A
- Miakonkikh, Andrew V
- Popov, Vladimir P
- Rudenko, Konstantin V
- Glukhov, Alexander V
- Kupriyanov, Igor N
- Ivanova, Nina D
- Rogozhin, Alexander E
- Archakov, Alexander I
- Ivanov, Yuri D
Producer: 20181029
In:
Biosensors vol. 8
Availability: No items available.
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