TY  - GEN
TI  - Deep-level-noise spectroscopy of ion-implanted polysilicon thin films
SN  - 0163-1829
PY  - 1988///
PB  - Physical review. B, Condensed matter
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1103/physrevb.38.1958
ER  -