TY  - GEN
TI  - Hydrogenation of low-pressure chemical-vapor-deposition silicon thin films
SN  - 0163-1829
PY  - 1987///
PB  - Physical review. B, Condensed matter
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1103/physrevb.36.9168
ER  -