TY  - GEN
TI  - Energy deposition of energetic silicon atoms within a silicon lattice
SN  - 1050-2947
PY  - 1990///
PB  - Physical review. A, Atomic, molecular, and optical physics
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1103/physreva.41.4058
ER  -