Energy deposition of energetic silicon atoms within a silicon lattice.  [electronic resource] 

 -  Physical review. A, Atomic, molecular, and optical physics  Apr 1990 
 - 4058-4061 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1050-2947 
<br/><br/><label>Standard No.: </label>10.1103/physreva.41.4058  doi