TY  - GEN
AU  - Irwin,D A
AU  - Klenow,P J
TI  - Sematech: purpose and performance
SN  - 0027-8424
PY  - 1996///1230
KW  - Costs and Cost Analysis
KW  - Research
KW  - economics
KW  - Research Support as Topic
KW  - Semiconductors
KW  - United States
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1073/pnas.93.23.12739
ER  -