TY  - GEN
AU  - Krueger,R R
AU  - Wang,X W
AU  - Rudisill,M
AU  - Trokel,S L
AU  - McDonnell,P J
TI  - Diffractive smoothing of excimer laser ablation using a defocused beam
SN  - 1081-0803
PY  - 1994///0808
KW  - Lasers
KW  - Methylmethacrylate
KW  - Methylmethacrylates
KW  - radiation effects
KW  - Microscopy
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, P.H.S
ER  -