TY  - GEN
AU  - Seifert,Marietta
AU  - Lattner,Eric
AU  - Menzel,Siegfried B
AU  - Oswald,Steffen
AU  - Gemming,Thomas
TI  - Phase Formation and High-Temperature Stability of Very Thin Co-Sputtered Ti-Al and Multilayered Ti/Al Films on Thermally Oxidized Si Substrates
SN  - 1996-1944
PY  - 2020///
PB  - Materials (Basel, Switzerland)
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.3390/ma13092039
ER  -