Seifert, Marietta <br/><br/>
Phase Formation and High-Temperature Stability of Very Thin Co-Sputtered Ti-Al and Multilayered Ti/Al Films on Thermally Oxidized Si Substrates.  [electronic resource] 

 -  Materials (Basel, Switzerland)  Apr 2020 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1996-1944 
<br/><br/><label>Standard No.: </label>10.3390/ma13092039  doi