Garg, Vivek Controlled Manipulation and Multiscale Modeling of Suspended Silicon Nanostructures under Site-Specific Ion Irradiation. [electronic resource] - ACS applied materials & interfaces Feb 2020 - 6581-6589 p. digital Publication Type: Journal Article ISSN: 1944-8252 Standard No.: 10.1021/acsami.9b17941 doi