TY  - GEN
AU  - Frigg,Andreas
AU  - Boes,Andreas
AU  - Ren,Guanghui
AU  - Abdo,Islam
AU  - Choi,Duk-Yong
AU  - Gees,Silvio
AU  - Mitchell,Arnan
TI  - Low loss CMOS-compatible silicon nitride photonics utilizing reactive sputtered thin films
SN  - 1094-4087
PY  - 2019///1230
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/OE.380758
ER  -