Frigg, Andreas <br/><br/>
Low loss CMOS-compatible silicon nitride photonics utilizing reactive sputtered thin films.  [electronic resource] 

 -  Optics express  Dec 2019 
 - 37795-37805 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1094-4087 
<br/><br/><label>Standard No.: </label>10.1364/OE.380758  doi