TY  - GEN
AU  - Wang,Yuancheng
AU  - Qu,Hongwei
AU  - Wang,Yufei
AU  - Dong,Fengxin
AU  - Chen,Zhonghao
AU  - Zheng,Wanhua
TI  - Radio Frequency Plasma-Enhanced Reactive Magnetron Sputtering Deposition of α-SiN 
SN  - 2470-1343
PY  - 2019///
PB  - ACS omega
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1021/acsomega.9b02452
ER  -