TY  - GEN
AU  - Lin,H K
AU  - Huang,Y J
AU  - Shih,W C
AU  - Chen,Y C
AU  - Chang,W T
TI  - Crystalline characteristics of annealed AlN films by pulsed laser treatment for solidly mounted resonator applications
SN  - 2661-801X
PY  - 2019///
PB  - BMC chemistry
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1186/s13065-019-0550-6
ER  -