Hiraki, Tatsurou <br/><br/>
Membrane InGaAsP Mach-Zehnder modulator with SiN:D waveguides on Si platform.  [electronic resource] 

 -  Optics express  Jun 2019 
 - 18612-18619 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1094-4087 
<br/><br/><label>Standard No.: </label>10.1364/OE.27.018612  doi