Kazieva, T V <br/><br/>
3D push-pull heterodyne interferometer for SPM metrology.  [electronic resource] 

 -  Applied optics  May 2019 
 - 4000-4006 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1539-4522 
<br/><br/><label>Standard No.: </label>10.1364/AO.58.004000  doi