TY  - GEN
AU  - Arat,Kerim Tugrul
AU  - Bolten,Jens
AU  - Zonnevylle,Aernout Christiaan
AU  - Kruit,Pieter
AU  - Hagen,Cornelis Wouter
TI  - Estimating Step Heights from Top-Down SEM Images
SN  - 1435-8115
PY  - 2019///
PB  - Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1017/S143192761900062X
ER  -