Attota, Ravi Kiran <br/><br/>
Nondestructive shape process monitoring of three-dimensional high aspect ratio targets using through-focus scanning optical microscopy.  [electronic resource] 

 -  Measurement science & technology  12 2018 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>0957-0233 
<br/><br/><label>Standard No.: </label>10.1088/1361-6501/aae4c2  doi