TY  - GEN
AU  - Wang,Chaowei
AU  - Yang,Liang
AU  - Zhang,Chenchu
AU  - Rao,Shenglong
AU  - Wang,Yulong
AU  - Wu,Sizhu
AU  - Li,Jiawen
AU  - Hu,Yanlei
AU  - Wu,Dong
AU  - Chu,Jiaru
AU  - Sugioka,Koji
TI  - Multilayered skyscraper microchips fabricated by hybrid "all-in-one" femtosecond laser processing
SN  - 2055-7434
PY  - 2019///
PB  - Microsystems & nanoengineering
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1038/s41378-019-0056-3
ER  -