Wang, Chaowei <br/><br/>
Multilayered skyscraper microchips fabricated by hybrid "all-in-one" femtosecond laser processing.  [electronic resource] 

 -  Microsystems & nanoengineering  2019 
 - 17 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>2055-7434 
<br/><br/><label>Standard No.: </label>10.1038/s41378-019-0056-3  doi