Chambonneau, M <br/><br/>
Positive- and negative-tone structuring of crystalline silicon by laser-assisted chemical etching.  [electronic resource] 

 -  Optics letters  Apr 2019 
 - 1619-1622 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1539-4794 
<br/><br/><label>Standard No.: </label>10.1364/OL.44.001619  doi