Raele, Marcus Paulo Focus Tracking System for Femtosecond Laser Machining using Low Coherence Interferometry. [electronic resource] - Scientific reports 03 2019 - 4167 p. digital Publication Type: Journal Article; Research Support, Non-U.S. Gov't ISSN: 2045-2322 Standard No.: 10.1038/s41598-019-40749-6 doi