Rollo, Serena <br/><br/>
Single step fabrication of Silicon resistors on SOI substrate used as Thermistors.  [electronic resource] 

 -  Scientific reports  Feb 2019 
 - 2835 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>2045-2322 
<br/><br/><label>Standard No.: </label>10.1038/s41598-019-38753-x  doi