TY  - GEN
AU  - Vazquez Bengochea,Leticia
AU  - Sampurno,Yasa
AU  - Kavaljer,Marcus
AU  - Johnston,Rob
AU  - Philipossian,Ara
TI  - Characterization of CMP Slurries Using Densitometry and Refractive Index Measurements
SN  - 2072-666X
PY  - 2018///
PB  - Micromachines
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.3390/mi9110542
ER  -