TY  - GEN
AU  - Li,Rui-Jun
AU  - Xu,Peng
AU  - Wang,Peng-Yu
AU  - Fan,Kuang-Chao
AU  - Cheng,Rong-Jun
AU  - Huang,Qiang-Xian
TI  - Development of a Micro/Nano Probing System Using Double Elastic Mechanisms
SN  - 1424-8220
PY  - 2018///1217
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.3390/s18124229
ER  -