Zhang, Xiang <br/><br/>
A three-step displacement measurement method for a 3-DOF macro-micro positioning stage.  [electronic resource] 

 -  The Review of scientific instruments  Nov 2018 
 - 113701 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1089-7623 
<br/><br/><label>Standard No.: </label>10.1063/1.5046700  doi