TY  - GEN
AU  - Klemenschits,Xaver
AU  - Selberherr,Siegfried
AU  - Filipovic,Lado
TI  - Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review
SN  - 2072-666X
PY  - 2018///
PB  - Micromachines
N1  - Publication Type: Journal Article; Review
UR  - https://doi.org/10.3390/mi9120631
ER  -