Klemenschits, Xaver <br/><br/>
Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review.  [electronic resource] 

 -  Micromachines  Nov 2018 
<br/><br/> Publication Type: Journal Article; Review 
<br/><br/><label>ISSN: </label>2072-666X 
<br/><br/><label>Standard No.: </label>10.3390/mi9120631  doi