Panda, Padmalochan <br/><br/>
Local crystal structure and mechanical properties of sputtered Ti-doped AlN thin films.  [electronic resource] 

 -  Physical chemistry chemical physics : PCCP  Dec 2018 
 - 29817-29825 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1463-9084 
<br/><br/><label>Standard No.: </label>10.1039/c8cp06089d  doi