TY - GEN AU - Cao,Binh Xuan AU - Bae,Munju AU - Sohn,Hyonkee AU - Choi,Jiyeon AU - Kim,Youngduk AU - Kim,Jeng-O AU - Noh,Jiwhan TI - Design and Performance of a Focus-Detection System for Use in Laser Micromachining SN - 2072-666X PY - 2016/// PB - Micromachines N1 - Publication Type: Journal Article UR - https://doi.org/10.3390/mi7010002 ER -